Firstly , a new interface roughness scattering model is developed using exponential autocovariance functions . the simulation results show that the electron mobility calculated using the exponential model are in good agreement with the experiment data 先推导了一种sic反型层表面粗糙散射的指数模型,研究证明应用此模型能够更精确地研究sicmos沟道载流子的输运规律。