差动测量的英文
differential measurements
例句与用法
- Differential measuring instrument
差动测量仪表 - Measurement of coating thickness by differential measurement using a stylus instrument
涂层厚度测量.使用触针仪器以差动测量法测量涂层厚度 - In order to make the sensitivity of 2 - demension accelerometer along the two main arbors almost identical , symmetric four - beam structure that embeds a double - sides interdigitated differential capacitive with puckered beam in two directions was used as sensitive component . in addition , the differential capacitive accelerometer fabricated by bulky silicon micromechanical technique has high sensitivity , wide measurement scope , less nonlinear error , and simple converting circuit . then , the structure parameters of the sensitive component were calculated and stimulated , which results in a set of the optimized structure design parameters , main fabrication procedure and several key fabrication technology
为使二维振动传感器在两主轴方向的灵敏度大致相同,敏感元件采用高度对称的四梁结构,其中每个轴向上均采用带折叠梁的双侧叉指电容结构,采用体硅微机械工艺制作的高深宽比叉指电容式敏感元件,具有高灵敏度、宽量程、非线性误差小、外围电路简单等优点;对设计的敏感元件结构参数进行了计算,并利用有限元法进行了仿真分析,根据仿真结果得出了优化参数;在确定敏感结构的基础上,研究了敏感元件采用体硅微机械加工工艺制作的工艺流程和关键工艺技术;对敏感芯片内部的c - v接口电路进行了原理设计与分析,利用差动测量技术得到由振动引起的微小电容变化量,经c - v接口电路进行相位调制处理,然后通过解调输出与加速度成正比的电压信号。
