硅加工工艺的英文

silicon process technology

例句与用法

The silicon force sensor using bulk silicon process has lots of advantages such as batch producible , low cost , high precision , small driving force , high reliability , low power consuming , small dimension , light weight and quick response , etc . therefore , a scheme is proposed in this paper
由于微机械工艺采用的技术多是半导体工业的硅表面工艺和体硅加工工艺，因此这种传感器可以大批量制造，且具有低成本、高精度、低驱动、高可靠性、低功耗、占用空间小、重量轻和响应速度快等优点。