预对准的英文
prealignment
例句与用法
- The main content of the research is to design and manufacture a system that is fit for 12 - inch wafer pre - aligning
主要研究内容是研制用于12英寸晶圆预对准的系统。 - The wafer processing system is an important subsystem of the lithography , which consists of a wafer transmission system and a wafer pre - alignment system
晶圆处理系统是光刻机的重要组成子系统,其包含两个主要部分:晶圆传输系统和晶圆预对准系统。 - And ad - link acl - 8112hg data acquisition card is used in gas road exchanging controlling to make this exchange reposefully in the system experiments , tests are given by system control programme
在预对准实验方面,编制控制程序,利用光学显微镜测量对心和对缺口偏差,计算系统对准重复精度,结果达到了技术要求。 - This paper surveys robotic wafer handling system for integrate circuit manufacturing , and reviews the operating principle and research results of the main components of the system , i . e . , wafer robot and prealigner
摘要介绍了面向集成电路制造业的硅片机器人传输系统，综述了其主要组成部分硅片机器人和预对准装置的工作原理及国内外研究成果。 - In the function decision and structure design , the function and the flow of the wafer pre - alignment system are analyzed , the system architecture is selected and the precision of this system is analyzed , the driving mode and the system structure are fixed , and then the motor and raster are selected . at the same time , the structure of parts is designed on consideration of the request and the function of the vacuum grasping of wafer
在总体方案和机构设计方面,分析了晶圆预对准系统的功能与流程,选定了系统的整体方案,确定了系统各单元的驱动方式和机构形式,完成了驱动和检测部分的选型,同时充分考虑机构中气动吸附部分的功能与要求,设计了预对准单元的机构。
