A monolithically integrated optoelectronic receiver is presented 摘要设计了一种单片集成的光电接收机芯片。
Implemented in the present deep sub-micron ms / rf ( mixed signal, radio frequency ) cmos, this monolithically oeic takes advantage of several new features to improve the performance of the photo-diode and eventually the whole oeic 这种单片集成接收机采用了先进的深亚微米ms/rf(混合信号射频)cmos工艺,利用这种新型工艺提供的新技术对原有光电二极管进行了改进,使其部分性能显著改善,并对整个光电集成芯片性能的提高有所帮助。
Laser induced diffusion is a technology that dope the impurities into a certain region of semiconductor by a focused laser . it has the advantages of “ low temperature processing ” and ” direct writing ”, and it is promising to use this technology in the fabrication of monolithically optoelctronic integrated circuits ( oeics ) to solve the incompatibility problem between optoelctronic and electronic components 激光诱导扩散是用聚焦的激光束局域加热半导体基片,将杂质以扩散的方式掺入到特定区域并且达到一定要求的一种技术,具有“低温处理”、“直接写入”、“局域升温”等独特优点,可有效解决单片光电集成器件(oeics)中光、电两部分的工艺兼容这一难题。