Then the ideal models ( dielectric isolation structure with high - voltage interconnection and without high - voltage interconnection ) are simulated by a 2d device simulator medici respectively . according to the simulation results , the two models ’ breakdown mechanism is analyzed and compared , and the influence of the isolated trench structure parameter on breakdown - voltage is studied , synchronously 借助二维数值仿真软件medici对理想模型(有、无高压互连线两种情况的介质隔离结构)进行仿真,分析其耐压机理,研究隔离槽参数(槽宽、槽内氧化层厚度)对击穿电压的影响。
