Micro electro mechanical systems , mems , is a class of systems that are physically small , with dimensions in the micron ( 10 - 6meters / micron ) range . these systems have both electrical and mechanical components 微电子机械系统是由特征尺寸在亚微米至毫米范围内的电子和机械元件组成的微器件或微系统。
Micromanipulation is an important emerging technique developed mainly during the past decade , which is widely applied in the fields of micro system , bio - engineering , microsurgery manipulation , and so on 过去的十多年间,微操作技术得到了长足的发展,其应用已经广泛涉及到微系统、生物工程、医学等领域。
In this paper , the development of micro - system is explained . the present research of binary optics and the main methods for shaping are described and some kinds of the methods of etching are compared 本文阐述了微系统的发展过程，叙述了二元光学的研究现状和二元光学的成型过程，比较了几种不同的刻蚀过程方法。
At present , there are two wireless data platforms which are sustained by major mobile carriers , j2me of sun and brew of qualcomm . this thesis will analyze 、 research and describe brew in different aspects 目前得到运营商最大支持的平台主要有太阳微系统( sun )公司推出的j2me平台和美国高通( qualcomm )公司推出的无线二进制运行环境( brew )平台。
The laboratory works for two majors : " instrument science and technology " and " microelectromechanical system engineering " , and takes the major responsibility in teaching and research for the major : " microelectromechanical system engineering " 微系统与控制技术研究室服务于"仪器科学与技术"和"微机电系统工程"两个专业，是新专业"微机电系统工程"教学科研的主要承担单位。
Before working at motorola , zafirovski spent 20 years in executive positions at general electric co . , including as president - ceo of five of its subsidiaries . zafirovski is replacing former u . s . admiral bill owens as nortel ' s ceo 在2003年摩托罗拉的首席执行官格里斯退休时，扎菲洛夫斯基曾被认为是首席执行官的热门人选，但董事会最终选择了前美国太阳微系统公司总裁桑德尔。
Tadashi shuibakawa , min - sheng hung , and masao washizu * , " laser - induced local decomposition of a chromosome and dna stretching by electroosmotic flow " , the 10th symposium on chemistry and micro - nano - system , takamatsu , japan , 25 - 26 november ( 2004 ) 洪敏胜* ，朱菀婷，郭婷勋，陈柏嘉，艾群， "细胞裂解与dna萃取之研究" ，第九届奈米工程暨微系统技术研讨会，台南， 11月10 - 11日( 2005 )
Delamination occurred when the liquid and gas phases of water coexist in micro - holes at chip / underfill interface . the adhesive strength between underfill and chip would be reduced due to the absorbed water molecules , resulting in extension and linkage of these micro - holes to form the delamination 认为在一定的水汽浓度下，器件内部塑封材中国科学院上海微系统与信启、技术研究所博十学位论文料在界面处的微孔洞可能出现气液两相共存。
Focusing on microfluidic chips for biochemical analysis , the research consists of establishing theoretical basis for system design and fabrication , solving key processing problems , developing new techniques , equipment and instrument for bio - mems , and research on microfluidics and micro stereo vision 以应用于生化分析的微流控芯片为研究对象，建立系统设计与加工理论，解决关键工艺技术，开发新工艺、新设备和微系统测试技术，开展微流体输运和显微立体视觉研究。
Micro power is one of key area in the development of mems technology . with the quick development and maturity of mems technology , micro power has become the key problem in this field . it is an important element in realizing the autonomous working of mems sensors , actuators and microsystems 微电源是mems技术发展最重要的研究方向之一，随着mems技术的迅速发展和成熟，微电源已成为该领域急待研究解决的关键问题，是实现mems传感器、执行器和微系统独立工作最重要的关键基础部件。
