Diamond film un - doped is highly insulated and so is not processed by electrical discharge machining method 未掺杂cvd金刚石膜是高度绝缘的，不能采用如电火花等加工导电聚晶金刚石( pcd )的方法和设备对其进行加工。
The work was shown as following : 1 ) the nucleation in different substrates is an important process in the deposition of diamond 主要研究内容： 1 )研究金刚石膜在不同衬底的形核问题是沉积高质量的金刚石膜的主要问题。
Finally , a set of equipment of eacvd for deposition of diamond film is successfully developed and diamond film is obtained by using of the equipment 结果成功制造出一台eacvd金刚石膜沉积设备，并在此设备上生长出金刚石膜。
Abstract : a buoyancy method of measure diamond fi lms density was reported . feature of the method is quick , convenient accuracy and practical 文摘:本文报道了一种测量金刚石膜密度的浮力法。这种方法的特点是快速、方便、准确和实用。
The paper mainly studies the factors to influence the fracture characteristic of diamond film from the micro - structure of low fracture diamond film 摘要主要从低断裂性能的金刚石膜的显微结构方面，研究影响金刚石膜断裂性能的因素。
4 . the machining mechanism was investigated . it is comprehensive outcome of melting , gasification , oxidation and surface graphitization 研究了电火花加工掺硼金刚石膜的去除机理，它是熔化、汽化、氧化、表面石墨化等综合作用的结果。
At last , the diamond film samples were investigated by x - ray - diffraction ( xrd ) and scanning electron microscopy ( sem ) in this paper 另外，本实验通过x衍射分析( xrd )和扫描电子显微镜( sem )对上述条件制备的金刚石膜结构和表面形貌进行表征。
In this paper , the nucleation process of diamond by filament cvd was analyzed , and enhanced flux of ions by negative substrate bias was investigated in theory 摘要木文对热灯丝cvd沉积金刚石膜的核化过程进行了分析，从理论上研究了负衬底偏压增强活性离子的流量。
The result shows that diamond ( 111 ) peak is indicated in x - ray - diffraction patterns , and diamond peak is very low because of non - diamond phase and defects 研究表明： xrd衍射图谱表明所得金刚石膜样品在2为43 . 9存在金刚石的( 111 )特征峰包，由于存在缺陷，金刚石峰出现宽化。
The incidence angle of laser beam and other factors have been found to result in more effective polishing , with optimal best smoothing observed at incident angles of 75 ? 探讨了激光切割和抛光金刚石膜的基本规律，详细探讨论述了激光的工艺参数对抛光效果和抛光效率的影响。
