But polycrystalline cvd diamond films have rough and non - uniform thickness which can adversely affect their application . furthermore , it is difficulty to machining the cvd diamond thick - film 但是， cvd金刚石膜为多晶材料，表面为杂乱分布的晶粒的堆积，显露出明显的棱角，表面粗糙度大，后续加工比较困难。
The electron microscope and raman spectra were used to analyze the diamond films after laser processing . 3 . experimental studies on mechanical polishing diamond film were carried out 并使用现代分析技术，对抛光表面进行sem扫描电镜和拉曼光谱等理化分析，分析了抛光表面的微观表面形态和激光抛光金刚石膜的机理。
Abstract as a good material in engineering , diamond can be used in many fields . however , natural diamond is scale and expensive , so people make synthetic one using chemical vapor deposition ( cvd ) 化学气相沉积( cvd )金刚石膜是具有优异的力学、电学、热学、声学和化学性能于一体的材料，在高科技领域具有十分广阔的应用前景。
Edm method was adopted to process b - doped diamond film and the process was studied . the morphology and composition of the machined diamond film was analyzed by sem and raman . surface roughness was measured by surface roughness tester 研究了电火花加工、电火花抛光和线切割加工掺硼金刚石膜工艺，对加工后的膜进行了sem分析、 raman分析和已加工表面粗糙度分析。
So it is an maximum challenge and difficulty to product heteroepitaxial big size high - orientation and single crystal diamond films and big area transparent diamond films in nodiamond substrate ' s surface for present diamond films " r & d 因此，目前金刚石薄膜研究面临的最大挑战和难点就是在非金刚石衬底表面异质外延生长大尺寸高取向和单晶金刚石膜以及制备大面积透明金刚石膜。
The growth of diamond nucleus and diamond film are studied , where how parameters affect the growth of diamond nucleus and diamond film are discused in detail as well as the relationship of the properties of the diamond film and the parameters 本文还对金刚石膜的生长工艺进行了初步探讨，论述了金刚石膜的成核与生长工艺，以及各参数对成核与生长工艺的影响。同时还叙述了金刚石膜质量和各工艺参数的关系。
Polycrystalline diamond films were deposited on n - type si substrates . in order to achieve a better distribution of the implanted element , boron ions were implanted by two steps . the i - v curves were studied , the p - n junction effect is very evident 在n型引衬底上沉积一层连续的金刚石膜，通过二次离子注入的方法使b离子比较均匀的分布在金刚石膜中，通过测量i - v曲线，可以明显的看出p - n结效应的存在。
The laser heats up the diamond and causes the temperature rises on the surface of diamond film . at the different temperature , the different physical and chemic change will happen . the rules of the laser ablating diamond were researched by experiment 从激光加热和热传导的理论出发，研究了激光传热及其在金刚石表面引起的温度分布情况，以及在不同的温度和激光功率下，金刚石膜发生的不同的物理和化学变化。
But there are still several problems concerning the stability and reproducibility of device fabrication . the heavily born doped p - type diamond films synthesized by hot filament chemical vapor deposition with b ( ch3 ) 3 as boron source substituted the metal electrode aluminum 本文还利用热灯丝化学汽相沉积( hfcvd )法，采用硼酸三甲酯b ( ch3 ) 3为硼源制备了重掺杂p型金刚石膜，作为lppp / alq异质结增强型发光器的电极。
( 2 ) diamond - like carbon films could be fabricated by plasma enhanced chemical vapor deposition method too , the surface morphology of the films was good , but the films had very big internal stress , which could be decreased by adding proper nitrogen gas in work chamber ( 2 )用等离子体增强化学气象沉积技术也能制备类金刚石膜。优点是用这种方法制备的薄膜表面形貌得到了一定的改善，但内应力较大，通过加入适量的氮气可以改善一些。
