In the function decision and structure design , the function and the flow of the wafer pre - alignment system are analyzed , the system architecture is selected and the precision of this system is analyzed , the driving mode and the system structure are fixed , and then the motor and raster are selected . at the same time , the structure of parts is designed on consideration of the request and the function of the vacuum grasping of wafer 在总体方案和机构设计方面,分析了晶圆预对准系统的功能与流程,选定了系统的整体方案,确定了系统各单元的驱动方式和机构形式,完成了驱动和检测部分的选型,同时充分考虑机构中气动吸附部分的功能与要求,设计了预对准单元的机构。
Recently , in the field of microfluidics system the drive mode of flow is a key problem , dc electroosmoticflow micropump bases on the principle of electroosmosis , which control the flow in the microchannel with electric field . recent years , it is more and more attracting people to realize it 当前在微流控系统中液体的驱动方式是一个关键问题,直流电渗流微泵是基于电渗原理,利用电场控制通道中的液体流动,实现无运动部件的液体流动系统,近年越来越受到人们的重视。
At first , according to the concrete requirement of the servo control system , a collective scheme , which provide guarantee to meet the requirements of the global performance , is established . in this scheme , the structure of gimbal and the torque motor driven mode are adopted , and angle measurement is accomplished by inductosyn and velocity measurement is accomplished by dynamically tuned gyro respectively 首先，根据目标真值测量设备伺服系统的具体要求，确定了地平式常平架结构，力矩电机驱动，分别采用动力调谐式速率陀螺仪及圆盘式感应同步器作为速率及位置反馈元件这一总体方案，为伺服系统满足整体性能指标要求提供了保证。
Based on the one - side processing technology , the dissertation proposes a new method of structure design and realizes the drive of sc by pure roller pairs of point engagement . this new drive mode apparently improves the driving accuracy , efficiency , life - span , movement and dynamic feature of scm 在凸轮廓面采用单侧面加工工艺基础上，提出了结构设计的改进形式，结合廓面修形方法，实现了空间凸轮机构点接触的纯滚动副传动，显然提高了机构的传动精度、效率、使用寿命、运动性能和动力性能。
Passenger car performance and fuel economy not only depend on the engine performance , but also on the transmission parameters and the powertrain matching . therefore , in order to obtain better fuel economy , the passenger car transmission parameters should be optimized to make the engine work almost in the low fuel consumption region when it operates in the real driving modes 客车发动机与传动系的合理匹配,就是根据客车的使用条件和要求,通过改进发动机、选择适当的传动系参数,使发动机的经常工作区尽量与理想工作区相吻合,以达到整车动力性和燃油经济性的改善。
By means of the theoretical analysis of the micromachined vibratory rate gyroscope , we get following conclusions : the microgyroscope can be driven by tangent electrostatic force produced by fence structure electrodes , and the normal electrostatic force can be neglected for the influence of the device property ; the parasitical capacitance and fringing effect can ’ t be neglected for the calculating of the detection capacitance ; the coefficient of damping force is comparatively little when the air damping in the driving mode and the sensing mode of the device is the couette flow damping 主要内容如下: 1 .分析了微机械陀螺的运动特性、静电驱动特性和在大气下的阻尼特性,分析结果表明,可以运用切向静电力驱动质量块振动,法向静电力对器件特性的影响可以忽略;在计算微结构电容时,电容的边缘效应和寄生电容不可忽略;在器件所受阻尼主要为库埃特流阻尼的情况下,阻尼力系数较小。
The entire drive mode adopts hydraulic + machine drive , enables the workover units & truck substructure of the rig achieving flexible stepless speed regulation ; the cat engine and allison transmission matches rationally , reliably , highly efficiency , firmly which raises the utilization ratio of engine capacity 整体传动形式采用液力+机械驱动，实现了修井机的修井装置和载运车底盘的柔性无级调速；卡特匹勒发动机与阿里逊力传动箱匹配合理，安全、高效、稳定，提高了发动机的功率利用率。
The joint designing has the requirements of small size , light weight , large output torque , wide motion area etc . the hydraulic drive mode , which has the character of great ratio between power and weight , huge load capacity , smart structure etc , can fulfill all the design demands 针对机器人关节要满足体积小、重量轻、输出力矩大、运动范围大等设计要求，采用液压驱动的方式以其具有功率重量比大、驱动力大、结构紧凑等优点，可以充分满足机器人关节的设计要求。
