A good vibration damping measure is very important for the enhanced working accuracy of machine tools , especially for that of ultra - precision machines . taking the sub - micron cnc ultra - precision turning machining for an example , this paper illustrated the vibration damping design features on configuration and material selecting , and put the emphasis on the vibration analysis of air spring vibration and aero - static bearing spindle . the theoretical analysis and experimental result have proved that the vibration damping measure is practical 良好的减振措施是提高机床,特别是超精密机床加工精度的重要技术之一.本文以亚微米超精密车床为研究对象,论述了该机床从结构到材料选取上的减振特点,并重点进行了空气弹簧和空气静压轴承主轴减振分析,由理论分析和实验表明:减振措施合理,减振效果良好