Uniform and compact plzt and sno _ 2 ceramic targets , which diameter were 212mm and 221mm , respectively , had been successfully fabricated . ( 2 ) a rotating magnetic field rf magnetron sputtering system had been designed and set up , which showed high utilization efficiency of target , high films uniformity , and high deposition rate , etc . ( 3 ) the plzt and sno _ 2 thin films were investigated by afm , xrd , sem , and spectral photometer . the optimized processing parameters of preparing these films had been found 并以此为基础分别制备了致密、均匀、平整、直径为212mm的plzt和221mm的sno _ 2陶瓷溅射靶材; ( 2 )为克服现有磁控溅射设备的不足,提出了一种新的磁控溅射方案,采用该方案的设备具有:靶材利用率高、镀膜均匀、成膜速度快等特点; ( 3 )运用afm 、 xrd 、 sem以及双光路分光光度计等分析手段对plzt和sno _ 2薄膜的微结构和性能进行研究,找到了制备plzt电光薄膜和sno2透明电极材料的最佳工艺条件。
A kind of novel composite photocatalysts containing tio2 and tourmaline particles , such as tourmaline / tio2 composite photocatalysts and tourmaline / [ tio2 , sio2 ] composite photocalysts , were fabricated mainly by the sol - gel technique , whose microstructure , photocatalystic activities and spontaneous polarization were investigated by the scanning electron microscope ( sem ) , uv - visible spectro - photometer , etc . the novel porous composite films of tourmaline / tio2 were prepared from alkoxide solutions on the surface of copper by sol - gel method 本工作利用电气石矿物材料的天然电极性、辐射红外线性能和tio _ 2的光催化性能，研制以电气石为载体， tio _ 2薄膜和[ tio _ 2 ， sio _ 2 ]复合薄膜为催化剂的新型复合催化材料。研究材料的制备技术、结构、性能及电气石表面tio _ 2晶体生长机理、电气石增强tio _ 2光催化效率机理。
All my samples with good orientation are prepared by rf sputtering . then we invest surface morphology and crystal structure , optical and electrical properties of zno films by afm , xrd , hall testing , ultraviolet - visible spectrum photometer and xps et al . zno films are fabricated on gaas substrate 本文用射频反应磁控溅射制备了高度c轴择优取向的zno薄膜,采用原子力显微镜( afm ) 、 x射线( xrd ) 、 hall测试仪、紫外?可见分光光度计和x光电子能谱等分析测试手段,研究了样品的表面形貌、晶体结构、光学和电学性能等。
