In this method , the mems design flow from the system level to device and process level was established and proved by the design of micro gyroscope . in the system level , the system modeling characterized by multi - discipline was simplified and solved by lumped - parameter modeling and nodal analysis method . the mems component library was constructed through analog hardware description language 首先，针对mems系统级设计的多学科交叉的特点，提出了以集中参数建模方法解决mems系统的功能建模，以节点分析法解决不同功能元件的结构实现，以混合信号硬件描述语言作为系统建模和仿真的基础，并以此建立mems元件库。
