Abstract : a kind of capacitor sensor to make computer - based measurements to level angle is designed . it is with the aid of artificial neural network that we can non - linearity map the level angle with the output values regarding to the changing environmental conditions 文摘:利用电容式传感器实现水平偏转角度的计算机检测，在考虑环境条件变化的情况下，利用人工神经网络实现偏转角与输出量值的非线性映射。
This paper tries to use the capacitive method to measure sediment concentration in flow - water and use the self - regulating capacitance sensor to carry experimentation in order to study a way and technology used to measure the sediment concentration in a nicety - speediness and on - line way 本研究尝试着采用电容法测量水流泥沙含量，并用自行研制的电容式传感器进行试验，研究准确、快速、在线测量水流中泥沙含量的方法和技术。
The critical pulse acceleration or the critical step acceleration for different angles of decline can be got from the research result s . the edge effects of the comb - capacitors having small angle of decline are researched by using the electronics module of the finite element tool ansys 传感器所能承受的对应不同倾斜角度的最大脉冲加速度或最大阶跃加速度可以通过文中建立的分析模型得到，这对梳齿电容式传感器的设计可以提供参考。
Mems ( micro electromechanical system ) has become one of the most rapidly development technologies . along with the rapid development of mems techniques , capacitive sensor is used widely whose capacitance changes small , which has put forward the new request to the measurement technique . the common measure for capacitance measurement is that convert capacitance to voltage , electric current or frequency . the area of polar plate of the capacitor becomes smaller and smaller , and the total capacitance of micro capacitive sensor is usually several pico farad only . as a result , its change amount is smaller Mems ( microelectromechanicalsystem )近年来发展最快的技术之一,随着mems技术的快速发展,电容式加速度计的电容变化变化量越来越小,对检测技术提出了新的要求。在电容式传感器中,常用电容检测电路是将其转换为电压、电流或者频率信号。目前的微型电容传感器的极板面积变得越来越小,电容总量只有几个pf ,变化量就更小。
In the dissertation , the effects of bias voltage polarity on the measurement and the normal operation are deeply researched when the voltage polarity is positive - positive , negative - positive and negative - negative respectively . the results are compared with the ones studied by others when the voltage polarity is positive - negative . the air damping of the laterally driven microstructures is slide - film air damping 本文通过改变偏置电压极性分别为正?正、负?正、负?负，并和偏置电压极性为正?负配置时进行对比，深入研究了电容式传感器在不同偏置电压极性下，驱动信号产生的静电力对传感器检测和工作性能的影响。
In the dissertation , the effects of the air slide - film damping on the capacitive accelerometers having different slot structures which are completely or partly etched , and fabricated by the anodic bonding between silicon and glass and bulk silicon micromachining process are researched by changing the distance between the moving structure and substrate , the thickness of the structure , the width of the completely etched slot structure , the depth of the partly etched slot structure according to the two well known air slide - film damping models 对于横向运动的体微机械器件，其周围空气表现为滑膜阻尼。本文基于滑膜阻尼的两个模型，通过改变振子与衬底的间距、振子的厚度、刻透的栅槽的宽度、没有刻透的栅槽的深度等参数，研究了这些参数对硅?玻璃键合工艺制作的体硅微机械电容式传感器阻尼特性的影响。
In the dissertation , the response characteristics of capacitive accelerometer whose sensing and driving combs have small angles of decline for step and shock signals are deeply researched for different driving voltage configurations . the dependences of the critical time of the pulse signal and the critical step signal for the different configurations and different angles of decline are developed 本文深入研究了梳齿小角度倾斜的电容式传感器，不同驱动电容配置下受到脉冲加速度信号和阶跃加速度信号作用时的响应特性，得到了在不同驱动电容配置，不同倾斜角度情形下的临界脉冲可持续时间和最大阶跃加速度信号随驱动电压的变化曲线。
