Illustrates several wide fov optical structure forms , the features of diffraction optics improving the performances of star sensor are demonstrated . a kind of hybrid optics of refraction and diffraction with a boe is studied in a test star sensor 对满足大视场要求的几种新型光学系统进行了分析对比；着重分析阐述了衍射光学系统特性对提高星敏感器性能的作用；对带有二元光学元件的折衍混合光学系统在星敏感器中的应用进行了实验研究。
It is very importance to analyze the evolution of microscopic surface features , which impact on the etching surface shape in solid etching process . much theoretical and experimental study point out that the different etching surface shapes by the plasma beam with same energy will be different 随着衍射光学元件的应用和半导体工业的发展，对刻蚀工艺中存在的导致刻蚀表面面形发生各种形变的诸多影响因素的数学分析是一个比较复杂和重要的问题。
Study on technology of laser direct writing photolithography based on cartesian and polar coordinate by using four - axis ldw system in this dissertation . several doe ' s fabricated by ldw have been applied in practice . the works have laid a foundation for developing more advanced ldw technology 本文开展了直角坐标和极坐标激光直写光刻理论与工艺研究，激光直写制作的衍射光学元件已得到了实际应用，为进一步发展激光直写光刻技术奠定理论与实验基础。
Based the diffraction theory of optical wave , designed by computer and etched to 2 or more steps of surface relief structure by laser beam ( or ion beam / electron beam ) on the substrate ( or the surface of the traditional optical device ) , boe is a kind of purely phase modulation diffraction device with extremely high diffraction efficiency Boe是指基于光波的衍射理论,利用计算机辅助设计,并用激光束(或离子束/电子束) ,在基片上(或传统光学器件表面)刻蚀产生两个或多个台阶深度的浮雕结构,形成纯位相、同轴再现、具有极高衍射效率的一类衍射光学元件。
The main work of this dissertation focuses on the analysis and design theory for a resonator with diffraction optical elements by using a matrix eigenvalue method . the principle and method how to realize a low diffraction beam have been described . both the experimental and theoretical results show that the low diffraction beam has great advantages over the gaussian beam in an ablation - dominated material removal processes 本文的重点是：阐述了利用矩阵本征值方法分析和设计激光谐振腔的系统理论；简述了产生和实现低衍射光束的原理和方法，实验发现了低衍射光束比高斯光束所具有的独特性能；理论设计和研制了衍射光学元件，并通过实验获得空心激光光束，提出了对不同空心光束的描述方法。
Interferometirc lithographic technology incorporates laser , interference optics , diffraction optics and optical lithography and it is a frontier research subject in microfabrication technology and microelectronic field sponserd by national natural science foundation of china . the research for this technology in theory , simulation and experiments has important scientific meanings and broad application prospect for promoting lithographic limit , developing nanometer electronic and photoelectron devices , novel large screen panel display and novel lithographic equipment of our country 干涉光刻技术集激光、干涉和衍射光学及光学光刻于一体，是国家自然科学基金资助的微细加工技术和微电子领域的前沿研究课题，对其进行理论、模拟和实验研究，对推进光学光刻极限，发展我国纳米微电子和光电子器件、新型大屏幕平板显示器和新型光刻机具有重要的科学意义和广阔的应用前景。
In this paper , series of work about the fabrication of large computer - generated diffractive optical elements on curved surfaces is carried out supported by the national natural science foundation ( 60078006 ) and state key laboratory of applied optics of the chinese academy of science . 1 本文在国家自然科学基金( 60078006 )和中科院创新基金( 2002lq4 ) ，以及中科院应用光学国家重点实验室的资助和支持下，开展了利用光刻技术在大口径凹球面玻璃基底上制作衍射光学元件的相关工作： 1
