The main research progresses of this thesis are shown as follow : 1 . the a - c films with notably different surface micro - morphology were successfully fabricated by adjusting the sputtering process . there features change from smooth to a fractal - like structure with abounding holes and complicated gofers 本论文的主要的研究工作进展如下: 1 .通过调控溅射工艺成功制备具有显著差异的表面形貌的非晶碳薄膜,其表面特征为从光滑平坦过渡到具有丰富的孔隙和极其复杂的皱褶的分形结构。
Interestingly the complicated surface is much like the microstructure of nature lotus leaf , which has never reported in a - c films ; via ca tests on the a - c films with different surface features indicated that the wettability of a - c films can be controlled in large scale , ranging from very hydrophilicity ( 40o ) to super - hydrophobicity ( 152o ) by only adjusting the surface morphology ; 2 对具有不同表面特征薄膜的润湿性能测试表明:仅仅通过工艺的调控,形貌的改变就可以使非晶碳薄膜的表面从非常亲水(接触角为40o )到超疏水(接触角为152o )大范围的浮动。 2 .通过计盒分维法将不同形貌的薄膜定量描述。
Combined with special wettability properties , a - c films may have greater potential applications . in present thesis , a series of a - c films were prepared by magnetron sputtering technique on substrates as si ( 100 ) and glass , and the deposited processes were controlled to adjust the morphology of the surfaces of a - c films . to further obtain the desired wettability , surface chemistry compound of the lotus - like surfaces were plasma modified by optimized processes 本文采用磁控溅射系统在普通玻璃和单晶硅上获得了具有不同表面形貌特征的非晶碳薄膜,此外利用等离子体表面处理系统,通过改进工艺方法,优化工艺条件,对非晶碳薄膜表面化学组成进行调控,获得了润湿性能从超亲水到超疏水范围变化的表面。
