kdy造句

• Abstract : the process defect , minor defect and key precess , their impact on quality and reliability , and the control method are introduced . the kdy control points , the parameter control scope and the requirement of process environment for high quality and reliability device are discussed
  摘要：重点介绍了国内外半导体器件制造工艺与器件可靠性的相关性报道：缺陷、微缺陷、关键工艺对器件质量和可靠性的影响及其控制方法；还介绍了关键工艺控制点的确定及其参数控制范围以及生产高质量、高可靠性器件的工艺环境的控制要求。