The research content and achievements of this thesis are as follows . it provided a theoretical discussion about the mechanism of the electrostatic suspension , including the mechanism of electrostatic induction and polarization , as well as the behavior of electrostatic force acting on the suspended objects 本文的主要研究工作内容、研究特色和创新之处包括:在理论上,全面系统地揭示了静电悬浮的机理,即静电极与悬浮体之间的静电感应或极化机理及静电力的作用规律。
By means of the theoretical analysis of the micromachined vibratory rate gyroscope , we get following conclusions : the microgyroscope can be driven by tangent electrostatic force produced by fence structure electrodes , and the normal electrostatic force can be neglected for the influence of the device property ; the parasitical capacitance and fringing effect can ’ t be neglected for the calculating of the detection capacitance ; the coefficient of damping force is comparatively little when the air damping in the driving mode and the sensing mode of the device is the couette flow damping 主要内容如下: 1 .分析了微机械陀螺的运动特性、静电驱动特性和在大气下的阻尼特性,分析结果表明,可以运用切向静电力驱动质量块振动,法向静电力对器件特性的影响可以忽略;在计算微结构电容时,电容的边缘效应和寄生电容不可忽略;在器件所受阻尼主要为库埃特流阻尼的情况下,阻尼力系数较小。
In this paper , we established a model of compressed electret micromotor and analysed the electrostatic force between stator and rotor based on the electro statics principle . and meanwhile , we worked out the theoretical calculation formula of output torque of single - stator micro - electrostatic motor series . we designed the double - stator compressed electret micromotor successfully and conducted the calculation formula of output torque of 2pole - 2pole compressed electret micromotor 本文基于静电学原理,进行了扁平驻极体微电机的建模,对其定转子间的静电力进行分析,导出了单定子微型静电电机系列的输出转矩计算公式,完成了双定子扁平驻极体微电机的设计,给出了2极- 2极扁平驻极体微电机的输出力矩计算公式。