In this dissertation , diffraction on one - dimensional period anisotropic gratings with arbitrary profile and arbitrary optical axis orientation , illuminated at an arbitrary incidence angle , is analyzed by using rigorous modal theory , and fourier factorization rules and recursive algorithm of reflection - transmission coefficient matrix ( rtcm ) are used in order to improve stability and convergence of numerical calculation 本文对任意面形、任意入射条件、任意光轴取向的一维各向异性周期光栅的衍射作了严格模式理论分析,并采用傅立叶因式分解和反射透射系数阵递推算法以提高数值计算的稳定性和收敛速度。